Mass Flow Controller Market

Market Definition

The market refers to the industry focused on devices that precisely measure and control fluid or gas flow by mass. These controllers are essential in industries like semiconductors, pharmaceuticals, and chemicals, where they are used for gas mixing, chemical dosing, and process control applications.

The report examines critical driving factors, industry trends, regional developments, and regulatory frameworks impacting market growth through the projection period.

Mass Flow Controller Market Overview

Global mass flow controller market size was valued at USD 1327.2 million in 2023, which is estimated to be valued at USD 1492.3 million in 2024 and reach USD 3544.6 million by 2031, growing at a CAGR of 13.15% from 2024 to 2031.

The growing need for precise and accurate control of fluid and gas flow in high-performance applications is driving demand for mass flow controllers, especially in industries like semiconductors, pharmaceuticals, and biotechnology.

Major companies operating in the mass flow controller industry are Brooks Instrument, MKS Instruments, Bronkhorst, Sierra Instruments, Inc., AALBORG INSTRUMENTS & CONTROLS, INC., OMEGA Engineering inc., Teledyne Technologies Incorporated., HORIBA, Ltd., Sensirion AG, TOKYO KEISO CO., LTD., Alicat Scientific, Inc., Vögtlin Instruments GmbH, Christian Bürkert GmbH & Co. KG, Azbil Corporation, and LINTEC.

The market is experiencing steady growth due to rising demand for accurate and reliable flow measurement across industries. As manufacturing processes become more complex and require higher precision, MFCs are increasingly used to improve efficiency and ensure consistent product quality.

Technological advancements such as IoT integration, improved sensor capabilities, and digital communication interfaces are further driving adoption. Additionally, the growing focus on automation and process optimization continues to expand the market's reach in both established and emerging sectors.

• In September 2023, Brooks Instrument introduced its third-generation Quantim QMC Coriolis mass flow controllers, designed for ultra-low flow accuracy in applications such as catalyst research, chemical pilot plants, semiconductor processing, fiber-optic production, and thin film coating, offering enhanced diagnostics, multivariable outputs, and IoT connectivity.

Key Highlights:

1. The mass flow controller industry size was recorded at USD 1327.2 million in 2023.
2. The market is projected to grow at a CAGR of 13.15% from 2024 to 2031.
3. North America held a market share of 35.27% in 2023, with a valuation of USD 468.1 million.
4. The thermal mass flow controller segment garnered USD 639.2 million in revenue in 2023.
5. The gas segment is expected to reach USD 2556.4 million by 2031.
6. The low flow segment held a market of 49.56% in 2023.
7. The semiconductor segment is anticipated to grow at a CAGR of 13.68% during the forecast period.
8. Asia Pacific is anticipated to grow at a CAGR of 14.05% during the forecast period.

Market Driver

"Rising demand for Precision and Accuracy"

One of the key growth drivers in the mass flow controller market is the increasing demand for precision and accuracy in controlling gas and liquid flow rates. Industries such as semiconductors and pharmaceuticals rely on precise flow control for critical processes like wafer fabrication and drug formulation as minor deviations can highly affect product quality.

The enforcement of stricter production standards and the rising complexity of applications are driving increased demand for highly reliable and accurate MFCs across developed and emerging economies.

• In March 2023, Sensirion launched the SFC6000 mass flow controller, offering a compact, lightweight design with high repeatability, fast response, and accuracy. Its exceptional price-performance ratio and short delivery times make it ideal for optimizing devices in advanced, high-precision environments across multiple industrial sectors, such as semiconductor and process automation.

Market Challenge

"Complex Calibration and Maintenance Requirements"

One significant challenge in the mass flow controller market is the complex calibration and maintenance requirements, particularly for high-precision devices used in sensitive applications like semiconductor manufacturing and pharmaceutical production.

These devices must maintain exact performance over time, making regular recalibration essential, which can be costly and time-consuming. A practical solution is the adoption of advanced MFCs with self-diagnostic capabilities and non-drifting sensor technologies, such as MEMS-based systems, which reduce the need for frequent recalibration and ensure long-term operational stability and accuracy.

Market Trend

"Customization and Material Flexibility"

A key trend in the mass flow controller (MFC) market is the growing preference for customization and material flexibility. Manufacturers are increasingly offering a range of materials, including stainless steel, aluminum, and specialized elastomers.

This flexibility allows MFCs to be tailored to various gas types and applications, such as corrosive gases in semiconductor or pharmaceutical industries. Such customization ensures improved compatibility, durability, and performance across a wide range of operating conditions, meeting specific customer needs in diverse sectors.

• In July 2024, Vögtlin Instruments introduced the d·flux gas mass flow controller for higher flows, addressing challenges with flows over 200 ln/min. Featuring advanced electronics, flexible material options, and precise control, it ensures stable gas flow management, accurate diagnostics, and easy configuration via a Bluetooth app.

Mass Flow Controller Market Report Snapshot

Segmentation	Details
By Type	Thermal Mass Flow Controller, Coriolis Mass Flow Controller, Differential Pressure Mass Flow Controller
By Flow Element	Liquid, Gas
By Flow Rate	Low Flow, Medium Flow, High Flow
By End-user	Oil & Gas, Semiconductor, Life Sciences, Chemical, Water and Wastewater, Food & Beverage, Others
By Region	North America: U.S., Canada, Mexico
	Europe: France, UK, Spain, Germany, Italy, Russia, Rest of Europe
	Asia-Pacific: China, Japan, India, Australia, ASEAN, South Korea, Rest of Asia-Pacific
	Middle East & Africa: Turkey, U.A.E., Saudi Arabia, South Africa, Rest of Middle East & Africa
	South America: Brazil, Argentina, Rest of South America

Market Segmentation:

• By Type (Thermal Mass Flow Controller, Coriolis Mass Flow Controller, Differential Pressure Mass Flow Controller): The thermal mass flow controller segment earned USD 639.2 million in 2023 due to the increasing demand for accurate and reliable flow measurement in critical industrial and semiconductor applications.
• By Flow Element (Liquid, Gas): The gas segment held 71.13% of the market in 2023, due to its widespread application across industries like pharmaceuticals, chemical processing, and energy, requiring precise gas flow control.
• By Flow Rate (Low Flow, Medium Flow, High Flow): The low flow segment is projected to reach USD 1807.1 million by 2031, owing to increasing demand for accurate flow control in sensitive processes, such as in medical equipment and research labs.
• By End-user (Oil & Gas, Semiconductor, Life Sciences, Chemical, Water and Wastewater, Food & Beverage, Others): The semiconductor segment is anticipated to have a CAGR of 13.68% during the forecast period, due to the growing need for precision flow control in semiconductor manufacturing and related technologies.

Mass Flow Controller Market Regional Analysis

Based on region, the market has been classified into North America, Europe, Asia Pacific, Middle East & Africa, and South America.

North America mass flow controller market share stood at around 35.27% in 2023 in the global market, with a valuation of USD 468.1 million. North America is the dominant region in the market due to its advanced semiconductors, pharmaceuticals, and life sciences industries. 

Continued investment in high-precision technologies, along with strong demand for reliable flow control solutions, supports sustained market growth. Additionally, the presence of key market players, well-established supply chains, and investments in research and development further strengthen North America's position as a key hub in the global MFC market.

Asia Pacific mass flow controller industry is poised for significant growth at a robust CAGR of 14.05% over the forecast period. Asia Pacific is the fastest-growing region for the market, fueled by the rapid expansion of industries such as semiconductors, electronics, and pharmaceuticals.

The region’s increasing demand for high-precision flow control systems, driven by technological advancements and industrial automation, is accelerating the market’s growth.

Additionally, the rise of manufacturing capabilities and the growing focus on research and development in countries like China, Japan, Malaysia and South Korea are contributing to the market's growth in the region.

• In September 2023, Brooks Instrument opened a new manufacturing facility in Penang, Malaysia. This expansion aims to meet the rising demand for mass flow controllers, especially in the semiconductor industry. The facility will significantly enhance Brooks Instrument's capacity and supply chain reliability across the Asia-Pacific region.

Regulatory Frameworks

• In the U.S. are regulated by the SEMI E27 standard, developed by SEMI (Semiconductor Equipment and Materials International), providing a uniform definition of linearity for mass flow devices, ensuring consistency between manufacturers and users. This standard is widely adopted in industries where precise gas flow control is essential, such as semiconductor fabrication.Additionally, the National Institute of Standards and Technology (NIST) plays a role in establishing measurement standards that impact the calibration and performance verification of MFCs. 
• Mass flow controllers sold in the European Union must comply with the Restriction of Hazardous Substances (RoHS) Directive 2011/65/EU and the Registration, Evaluation, Authorisation and Restriction of Chemicals (REACH) Regulation EC 1907/2006. Products must bear the Conformité Européenne (CE) mark to confirm compliance with safety, health, and environmental standards before entering the market.
• China enforces the China RoHS II regulation (Administrative Measures for the Restriction of Hazardous Substances in Electrical and Electronic Products), which restricts harmful materials in electronic components. The Standardization Administration of China (SAC) issues national standards that affect design, labeling, and performance testing of MFCs to ensure industrial safety and product uniformity.

Competitive Landscape

In the mass flow controller industry, companies are focusing on innovation to meet the increasing demand for precision in fluid and gas flow control. They are developing advanced mass flow controllers (MFCs) with enhanced capabilities, such as wider operating temperature ranges and improved materials compatibility.

Furthermore, companies are investing in expanding their manufacturing capabilities, particularly in regions like Asia-Pacific, to address the growing demand in sectors such as semiconductors, pharmaceuticals, and renewable energy. They are also enhancing their product features with smart technologies and remote monitoring solutions.

• In March 2024, Brooks Instrument launched the GF120xHT Series high-temperature mass flow controller, designed to support high-temperature semiconductor manufacturing. This new product addresses the challenges of handling solid and liquid precursors, with a wider operating range of 45°C to 150°C, improving process precision. The GF120xHT ensures reliable and accurate delivery, with advanced features like EtherCAT communication, fault detection, and seamless integration into customer applications.

List of Key Companies in Mass Flow Controller Market:

• Brooks Instrument
• MKS Instruments
• Bronkhorst
• Sierra Instruments, Inc.
• AALBORG INSTRUMENTS & CONTROLS, INC.
• OMEGA Engineering inc.
• Teledyne Technologies Incorporated.
• HORIBA, Ltd.
• Sensirion AG
• TOKYO KEISO CO., LTD.
• Alicat Scientific, Inc.
• Vögtlin Instruments GmbH
• Christian Bürkert GmbH & Co. KG
• Azbil Corporation
• LINTEC

Recent Developments (Product Launch)

• In February 2025, Festo launched the VEFC Mass Flow Controller, offering precise control of inert gases up to 200 l/min. The compact, 24mm-wide unit features energy-efficient piezoelectric valve technology and dynamic flow control. It is designed for applications in electronics manufacturing, food production, and semiconductor industries, providing tamper-proof, real-time data for efficient nitrogen utilization and reduced energy costs.
• In January 2025, HORIBA STEC launched the DZ-107 Ultra-thin Mass Flow Controller, offering seven times the full-scale flow of previous models. This advanced controller supports high-flow applications in semiconductor etching, deposition, and CVD/ALD processes. With a 10mm width and increased operational temperature range, it addresses the industry's evolving needs.